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| Sensor Attribute | Attribute Value |
| Product Category | Gas Flow Sensor Die |
| Product Series | GDF9304 |
| Chip Type | Mass Flow Sensor |
| Flow Range | 0～1SCCM ～2000SLM |
| Output Type | Analog mV output |
| Zero Flow Output | 1.2～1.8V (5Vdc Power Supply&20°C) |
| Zero Flow Differential Output | -50～50mV (5Vdc Power Supply&20°C) |
| Thermopile Resistance | 210～260KΩ (20°C) |
| Heater Resistance | 260～280Ω (20°C) |
| Power Supply | ≥3Vdc(Typical 5Vdc) |
| Operating Temperature | -50 to 150°C |
| Working Pressure | 15Bar(Typical Value) |
| Die Size(L*W*H) | 3x0.85x0.4mm(including Scribe Line 80μm) |
| QTY/Wafer | 5350pcs/6''Wafer |
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